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X-ray photoelectron spectroscopy





SEM column for  SEM, SAM and static Auger measurement

 Hemispherical electron spetrometer with 7 channel detection

 X-ray sources for XPS with monochromated and non-monochromated dual source

 High intensity VUV source for UPS measurement

 Ion gun for deth profiling

 Manipulator with heating and cooling system

 Electron charge neutraliser for insulators

 Multi-sample loading system

 Optical sample aligment

  Software – Cascade –experiment control software,   Imaging XPS package


Experimental methods:

X-ray photoelectron spectroscopy/ microscopy

Auger electron spectroscopy/ microscopy

Ultraviolet photoelectron spectroscopy

Ion scattering spectroscopy



Ing. Maroš Gregor, PhD.e-mail:, Phone: +421-2-60295-274+421-2-60295-274, 190

RNDr. Tomáš Plecenik, PhD., Prof. RNDr. Andrej Plecenik, DrSc., Prof. RNDr. Peter Kúš, DrSc.