X-ray photoelectron spectroscopy

Equipment:

SEM column for SEM, SAM and static Auger measurement

Hemispherical electron spetrometer with 7 channel detection

X-ray sources for XPS with monochromated and non-monochromated dual source

High intensity VUV source for UPS measurement

Ion gun for deth profiling

Manipulator with heating and cooling system

Electron charge neutraliser for insulators

Multi-sample loading system

Optical sample aligment

Software – Cascade –experiment control software, Imaging XPS package

Experimental methods:

X-ray photoelectron spectroscopy/ microscopy

Auger electron spectroscopy/ microscopy

Ultraviolet photoelectron spectroscopy

Ion scattering spectroscopy

Staff:

Ing. Maroš Gregor, PhD.e-mail: gregor@fmph.uniba.sk, Phone: +421-2-60295-274+421-2-60295-274, 190

RNDr. Tomáš Plecenik, PhD., Prof. RNDr. Andrej Plecenik, DrSc., Prof. RNDr. Peter Kúš, DrSc.